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Molecular Beam Epitaxy by Marian A. Herman
Molecular Beam Epitaxy by Marian A. Herman
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Molecular Beam Epitaxy

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Description

Molecular Beam Epitaxy describes a technique in wide-spread use for the production of high-quality semiconductor devices. It discusses the most important aspects of the MBE apparatus, the physics and chemistry of the crystallization of various materials and device structures, and the characterization methods that relate the structural parameters of the grown (or growing) film or structure to the technologically relevant procedure. In this second edition two new fields have been added: crystallization of as-grown low-dimensional heterostructures, mainly quantum wires and quantum dots, and in-growth control of the MBE crystallization process of strained-layer structures. Out-of-date material has been removed.
Release date NZ
October 3rd, 2013
Audience
  • Professional & Vocational
Edition
2nd ed. 1996. Softcover reprint of the original 2nd ed. 1996
Illustrations
25 Illustrations, color; 28 Illustrations, black and white; XIV, 453 p. 53 illus., 25 illus. in color.
Pages
453
Dimensions
155x235x24
ISBN-13
9783642800627
Product ID
21757781

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