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Shape and Functional Elements of the Bulk Silicon Microtechnique by Joachim Fruhauf
Shape and Functional Elements of the Bulk Silicon Microtechnique by Joachim Fruhauf
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Shape and Functional Elements of the Bulk Silicon Microtechnique

A Manual of Wet-Etched Silicon Structures
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Description

This methodic manual presents a survey of the form-related and functional elements of the bulk silicon microtechnique. It gives a systematic description of simple shape elements and of elements for mechanical, fluidic and optical applications. This manual includes practical instructions for the use of the relevant techniques and an extensive collection of examples for the support of the search for applications via photographs, drawings and references. It serves as a valuable guide to the design of etch masks and processes while summarizing the important properties of silicon, especially aiming at producers of sensors and microtechnical components, as well as producers of components of precision engineering and optical applications.
Release date NZ
October 13th, 2010
Audience
  • Professional & Vocational
Edition
Softcover reprint of hardcover 1st ed. 2005
Illustrations
XII, 222 p.
Pages
222
Dimensions
155x235x13
ISBN-13
9783642060489
Product ID
8963789

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Shape and Functional Elements of the Bulk Silicon Microtechnique on Hardback by Joachim Fruhauf
$289.00
Shape and Functional Elements of the Bulk Silicon Microtechnique
by Joachim Fruhauf ~ Hardback
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