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Plasma Processing of Semiconductors
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Plasma Processing of Semiconductors

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Description

Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications. Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.
Release date NZ
October 12th, 2012
Audience
  • Professional & Vocational
Contributor
  • Edited by P.F. Williams
Edition
Softcover reprint of the original 1st ed. 1997
Illustrations
X, 613 p.
Pages
613
Dimensions
160x240x32
ISBN-13
9789401064866
Product ID
21844549

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