Non-Fiction Books:

Plasma Etching

Fundamentals and Applications

Customer rating

Click to share your rating 0 ratings (0.0/5.0 average) Thanks for your vote!

Share this product

Plasma Etching by Minoru Sugawara
$579.99
In stock with supplier

The item is brand new and in-stock in with one of our preferred suppliers. The item will ship from the Mighty Ape warehouse within the timeframe shown below.

Usually ships within 10-14 days

Availability

Delivering to:

Estimated arrival:

  • Around 7-12 September using standard courier delivery

Description

The focus of this book is the remarkable advances in understanding of low pressure RF (radio frequency) glow discharges. A basic analytical theory and plasma physics are explained. Plasma diagnostics are also covered before the practicalities of etcher use are explored.

Author Biography

Professor Minoru Sugawara, Hachinohe Institute of Technology, Hachinohe-city, Aomori 031, Japan. Fax: (0) 178 25 1430
Release date NZ
May 28th, 1998
Country of Publication
United Kingdom
Illustrations
2 colour plates, 5 halftones, numerous line figures
Imprint
Oxford University Press
Pages
356
Dimensions
163x242x23
ISBN-13
9780198562870
Product ID
2247940

Customer reviews

Nobody has reviewed this product yet. You could be the first!

Write a Review

Marketplace listings

There are no Marketplace listings available for this product currently.
Already own it? Create a free listing and pay just 9% commission when it sells!

Sell Yours Here

Help & options

  • If you think we've made a mistake or omitted details, please send us your feedback. Send Feedback
  • If you have a question or problem with this product, visit our Help section. Get Help
  • Seen a lower price for this product elsewhere? We'll do our best to beat it. Request a better price
Filed under...

Buy this and earn 3,370 Banana Points