Non-Fiction Books:

Optical Inspection of Microsystems, Second Edition



Customer rating

Click to share your rating 0 ratings (0.0/5.0 average) Thanks for your vote!

Share this product

Optical Inspection of Microsystems, Second Edition

Pre-order to reserve stock from our first shipment. Your credit card will not be charged until your order is ready to ship.

Available for pre-order now
Pre-order Price Guarantee

If you pre-order an item and the price drops before the release date, you’ll pay the lowest price. This happens automatically when you pre-order and pay by credit card or pickup.

If paying by PayPal or internet banking, and the price drops after you have paid, you can ask for the difference to be refunded. Find out more

If Mighty Ape's price changes before release, you'll pay the lowest price.


This product will be released on

Delivering to:

It should arrive:

  • 26-30 April using standard courier delivery
    Unlikely to arrive before Christmas


This book provides an up-to-date survey of the most important and widely used full-field optical metrology and inspection technologies. Techniques such as interference microscopy, laser Doppler vibrometry, holography, speckle metrology, and spectroscopy are included. In this new edition are also found calibration of optical measurement systems for the insepction of MEMS, numerical tools for the characterization of microelectromechanical systems, deflectrometry for the inspection of MEMS, digitial holographic microscropy for the inspection of MEMS, and characterization of the dynamics of MEMS.
Release date NZ
April 22nd, 2019
Edited by Wolfgang Osten
Country of Publication
United States
2nd New edition
32 Illustrations, color; 525 Illustrations, black and white
Productivity Press
Product ID

Customer previews

Nobody has previewed this product yet. You could be the first!

Write a Preview

Help & options

  • If you think we've made a mistake or omitted details, please send us your feedback. Send Feedback
  • If you have a question or problem with this product, visit our Help section. Get Help
  • Seen a lower price for this product elsewhere? We'll do our best to beat it. Request a better price
Filed under...

Buy this and earn 1,903 Banana Points