Non-Fiction Books:

Optical Inspection of Microsystems, Second Edition

Format

Hardback

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Optical Inspection of Microsystems, Second Edition
$429.99
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  • 23 April using standard courier delivery

Description

This book provides an up-to-date survey of the most important and widely used full-field optical metrology and inspection technologies. Techniques such as interference microscopy, laser Doppler vibrometry, holography, speckle metrology, and spectroscopy are included. In this new edition are also found calibration of optical measurement systems for the insepction of MEMS, numerical tools for the characterization of microelectromechanical systems, deflectrometry for the inspection of MEMS, digitial holographic microscropy for the inspection of MEMS, and characterization of the dynamics of MEMS.
Release date NZ
April 22nd, 2019
Contributor
Edited by Wolfgang Osten
Country of Publication
United States
Edition
2nd New edition
Illustrations
32 Illustrations, color; 525 Illustrations, black and white
Imprint
Productivity Press
Pages
600
ISBN-13
9781498779470
Product ID
28124444

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