Non-Fiction Books:

Handbook of Thin Film Deposition

Theory, Technology and Semiconductor Applications
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Paperback / softback
$548.00
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  • 8-15 October using International Courier

Description

Handbook of Thin Film Deposition, Fifth Edition, is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro-properties, ferroelectric films, LED research, and materials for memory applications and other thin film applications. Of particular note in this new edition is the coverage of ‘reduction to practice,’ a phase where the idea for a technology transition from a concept to actual implementation. This section includes chapters that review the most relevant methods to fabricate thin films towards practical applications. The book also discusses the latest applications of various thin film deposition technologies. Handbook of Thin Film Deposition, 5th Edition is suitable for materials scientists, engineers, and managers working in academia or semiconductor related R&D.

Author Biography:

Dominic Schepis has over 35 years in the semiconductor industry supporting logic and memory technologies. As Principal Member of the Technical Staff at GlobalFoundries, Dominic worked on process development and integration for various advanced node CMOS technologies. His early work on SOI CMOS integration was instrumental to bringing this technology for use in IBM servers. He also was appointed Master Inventor at both IBM and Globalfoundries and served on their patent evaluation boards. A graduate from Rensselaer Polytechnic Institute, he joined IBM’s Semiconductor Research and Development Center (SRDC) and has worked on a variety of advanced research and development projects and supported process sectors including reactive ion etching, epitaxial film growth, process integration, and other unit processes. During his tenure there, he co-authored over 29 technical journal papers and has over 100 issued US patents. Former Assistant Professor in Materials Science at the University of Arizona with extensive professional experience as a technologist at both IBM and Intel Corporations. Dr. Seshan passed away in 2017.
Release date NZ
October 1st, 2024
Audience
  • Professional & Vocational
Contributors
  • Edited by Dominic Schepis
  • Edited by Krishna Seshan
Edition
5th edition
Pages
600
ISBN-13
9780443135231
Product ID
37984759

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