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Fabrication Engineering at the Micro- and Nanoscale

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Fabrication Engineering at the Micro- and Nanoscale

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Description

Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices. With many worked examples and detailed illustrations, this engaging introduction provides the tools needed to understand the frontiers of fabrication processes.

Author Biography:

Stephen A. Campbell is the Bordeau Professor of Electrical and Computer Engineering at the University of Minnesota and a fellow of IEEE.
Release date NZ
December 20th, 2012
Audience
  • Tertiary Education (US: College)
Edition
4th Revised edition
Pages
688
Dimensions
236x192x26
ISBN-13
9780199861224
Product ID
20962095

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