Non-Fiction Books:

Analysis of Microelectronic Materials and Devices

Format

Paperback

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Analysis of Microelectronic Materials and Devices
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Description

This book presents, for the first time, a comprehensive survey of analytical techniques currently used in support of all stages of microelectronic materials and device processing. The diversity of topics covered in this book has been achieved by bringing together an international field of authors contributing specialized individual chapters. This has ensured that each technique is discussed in detail giving in-depth treatments of the subject matter. A particularly helpful feature in this book is the concise technical summary given at the end of each section. Four major areas are considered in this volume:Bulk analysis of microelectronic materialsAnalysis of surfaces, interfaces and thin filmsStructure analysis on an atomic scaleCharacterization of physical, electrical and topographic features Complete with over 400 illustrations, this volume is an indispensible guide to analytical support for the microelectronic industry.
Release date NZ
March 3rd, 1994
Contributors
Edited by H W Werner Edited by M Grasserbauer
Country of Publication
United Kingdom
Imprint
John Wiley & Sons Ltd
Pages
980
Dimensions
156x229x51
ISBN-13
9780471950134
Product ID
3076895

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