Semiconductor Materials and Process Technology Handbook

By:

Gary F. McGuire

Format:

Hardback

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Description

A broad review of semiconductor materials and process technology with emphasis on VLSI and ULSI. Contents include: Silicon Materials Technology Thermal Oxidation of Silicon and Other Materials CVD of Silicon and its Compounds Chemical Etching and Slice Cleanup of Silicon Plasma Processing PVD Metallization for VLS Interconnect and Packaging Characterization of Semiconductor Materials.

Release date NZ

December 31st, 1988

Author

Gary F. McGuire

Audience

Professional & Vocational

Country of Publication

United States

Imprint

William Andrew Publishing

Pages

688

Publisher

William Andrew Publishing

Dimensions

178x254x38

ISBN-13

9780815511502

Product ID

7753930

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Semiconductor Materials and Process Technology Handbook

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