Non-Fiction Books:

Proceedings of the Institute of General Physics Academy of the Sciences of the USSR: Vol 8

Format

Hardback

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Proceedings of the Institute of General Physics Academy of the Sciences of the USSR: Vol 8
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Description

Translated from the Russian edition (Nauka Publishing House, 1987). Results are given from an experimental investigation of the kinetic principles of etching of polymer resists in low-temperature plasma, the processes of nonresistive ion lithography, and modifications of electron resist films by med
Release date NZ
January 1st, 1989
Contributors
Edited by Al Peabody Edited by T.M. Makhviladze
Country of Publication
United States
Imprint
Nova Biomedical
Pages
207
Dimensions
165x220x25
ISBN-13
9780941743303
Product ID
1838105

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