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Photomodulated Optical Reflectance by Janusz Bogdanowicz
Photomodulated Optical Reflectance by Janusz Bogdanowicz
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Photomodulated Optical Reflectance

A Fundamental Study Aimed at Non-Destructive Carrier Profiling in Silicon
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Description

One of the critical issues in semiconductor technology is the precise electrical characterization of ultra-shallow junctions. Among the plethora of measurement techniques, the optical reflectance approach developed in this work is the sole concept that does not require physical contact, making it suitable for non-invasive in-line metrology. This work develops extensively all the fundamental physical models of the photomodulated optical reflectance technique and introduces novel approaches that extend its applicability from dose monitoring towards detailed carrier profile reconstruction. It represents a significant breakthrough in junction metrology with potential for industrial implementation.
Release date NZ
July 17th, 2014
Audience
  • Professional & Vocational
Illustrations
XXIV, 204 p.
Pages
204
Dimensions
155x235x12
ISBN-13
9783642426865
Product ID
22639638

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Photomodulated Optical Reflectance on Hardback by Janusz Bogdanowicz
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