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Microsystem Technology and Microrobotics on Hardback by Sergej Fatikow
Microsystem Technology and Microrobotics on Hardback by Sergej Fatikow
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Microsystem Technology and Microrobotics

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Description

Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.
Release date NZ
March 20th, 1997
Audiences
  • Postgraduate, Research & Scholarly
  • Professional & Vocational
  • Technical / Manuals
  • Undergraduate
Edition
1997 ed.
Illustrations
XII, 408 p.
Pages
408
Dimensions
156x234x23
ISBN-13
9783540606581
Product ID
2807353

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