Introduction to Microsystem Design

By:

Werner Karl Schomburg

Format:

Paperback / softback

Series:

Rwthedition

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Description

The book describes the design of micro systems systematically as well as the equations needed for an estimation of the basic elements. It can be used without knowing fabrication processes of micro systems and provides the basic equations needed to calculate the effects and forces which are important in micro systems. For quick reference equations are presented in tables which are found in an index at the end of this book.

Author Biography:

Univ.-Prof. Dr. Werner Karl Schomburg was born in 1955 at Kiel, Germany. In 1983 he got his diploma in theoretical physics from Kiel University. He stayed at CERN in Geneva, Switzerland, for 3 month in 1982. He obtained his PhD from a university at Munich (LMU) in experimental nuclear physics in 1988. Until 2003 Prof. Schomburg was working at Karlsruhe Research Center, Institute of Micro Structure Technique. His group developed in this time the first micro pump, the first micro valve, and the first micro flow and micro pressure sensor from polymer. In 2004 he became a professor at RWTH Aachen University. From 2006 to 2009 he spent 3 weeks each year teaching at Tsinghua University in Beijing, China.

Release date NZ

August 3rd, 2013

Author

Werner Karl Schomburg

Audience

Professional & Vocational

Illustrations

XXII, 322 p.

Pages

322

Series

Rwthedition

Dimensions

155x235x19

ISBN-13

9783642268526

Product ID

21583407

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