Non-Fiction Books:

Glow Discharge Processes

Sputtering and Plasma Etching

Format

Hardback

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Glow Discharge Processes by Brian Chapman
$595.99
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Description

Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.
Release date NZ
November 5th, 1980
Author
Country of Publication
United States
Imprint
John Wiley & Sons Inc
Pages
432
Dimensions
165x241x28
ISBN-13
9780471078289
Product ID
3086479

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