For courses in Micro-Electro-Mechanical Systems (MEMS) taken by advanced undergraduate students, beginning graduate students, and professionals. Foundations of MEMS is the first entry-level text of its kind for systematically teaching the specifics of MEMS to an interdisciplinary audience. Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by incorporating evolving microfabrication technology - all in a time-efficient and methodical manner. A wealth of examples and problems solidify students, understanding of abstract concepts and provide ample opportunities for practicing critical thinking.
Table of Contents
(NOTE: All chapters start with a Preview and conclude with Problems and References.) Chapter 1: Introduction 1.0. Preview 1.1. The History of MEMS Development 1.2. The Intrinsic Characteristics of MEMS 1.3. Devices: Sensors and Actuators Chapter 2: Introduction to Microfabrication 2.0. Preview 2.1. Overview of Microfabrication 2.2. The Microelectronics Fabrication Process 2.3. Silicon-based MEMS Process 2.4. New Materials and Fabrication Processes 2.5. Points of Consideration for Processing Chapter 3: Review of Essential Electrical and Mechanical Concepts 3.0. Preview 3.1. Conductivity of Semiconductors 3.2. Crystal Planes and Orientations 3.3. Stress and Strain 3.4. Flexural Beam Bending Analysis Under Simple Loading Conditions 3.5. Torsional Deflections 3.6. Intrinsic Stress 3.7. Resonant Frequency and Quality Factor 3.8. Active Tuning of Spring Constant and Resonant Frequency 3.9. A List of Suggested Courses and Books Chapter 4: Electrostatic Sensing and Actuation 4.0. Preview 4.1. Introduction to Electrostatic Sensors and Actuators 4.2. Parallel-Plate Capacitors 4.3. Applications of Parallel-Plate Capacitors 4.4. Interdigitated Finger Capacitors 4.5. Applications of Comb-Drive Devices Chapter 5: Thermal Sensing and Actuation 5.0. Preview 5.1. Introduction 5.2. Sensors and Actuators Based on Thermal Expansion 5.3. Thermal Couples 5.4. Thermal Resistors 5.5. Applications Chapter 6: Piezoresistive Sensors 6.0. Preview 6.1. Origin and Expression of Piezoresistivity 6.2. Piezoresistive Sensor Materials 6.3. Stress Analysis of Mechanical Elements 6.4. Applications of Piezoresistive Sensors Chapter 7: Piezoelectric Sensing and Actuation 7.0. Preview 7.1. Introduction 7.2. Properties of Piezoelectric Materials 7.3. Applications Chapter 8: Magnetic Actuation 8.0. Preview 8.1. Essential Concepts and Principles 8.2 Fabrication of Micromagnetic Components 8.3. Case Studies of MEMS Magnetic Actuators Chapter 9: Summary of Sensing and Actuation 9.0. Preview 9.1. Comparison of Major Sensing and Actuation Methods 9.2. Tunneling Sensing 9.3. Optical Sensing 9.4. Field Effect Transistors 9.5. Radio Frequency Resonance Sensing Chapter 10: Bulk Micromachining and Silicon Anisotropic Etching 10.0. Preview 10.1. Introduction 10.2. Anisotropic Wet Etching 10.3. Dry Etching of Silicon - Plasma Etching 10.4. Deep Reactive Ion Etching (DRIE) 10.5. Isotropic Wet Etching 10.6. Gas-Phase Etchants 10.7. Native Oxide 10.8. Wafer bonding 10.9. Case Studies Chapter 11: Surface Micromachining 11.0. Preview 11.1. Basic Surface Micromachining Processes 11.2. Structural and Sacrificial Materials 11.3. Acceleration of Sacrificial Etch 11.4. Stiction and AntiStiction Methods 11.5. Assembly of 3D MEMS 11.6. Foundry Process Chapter 12: Polymer MEMS 12.0. Preview 12.1. Introduction 12.2. Polymers in MEMS 12.3. Representative Applications Chapter 13: Microfluidics Applications 13.0. Preview 13.1. Motivation for Microfluidics 13.2. Essential Biology Concepts 13.3. Basic Fluid Mechanics Concepts 13.4. Design and Fabrication of Selective Components Chapter 14: Instruments for Scanning Probe Microscopy 14.0. Preview 14.1. Introduction 14.2. General Fabrication Methods for Tips 14.3. Cantilevers with Integrated Tips 14.4. SPM probes with Sensors and Actuators Chapter 15: Optical MEMS 15.0. Preview 15.1. Passive MEMS Optical Components 15.2. Actuators for Active Optical MEMS Chapter 16. MEMS Technology Management 16.0. Preview 16.1. R&D Strategies