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Electroceramic-Based MEMS

Fabrication-Technology and Applications
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Description

The book is focused on the use of functional oxide and nitride thin films to increase functionality and application range of MEMS (microelectromechanical systems) in the large sense, including micro-sensors, micro-actuators, and electronic components for high frequency communications. The book covers major topics and is divided into two parts (a) applications and emerging applications, and (b) materials, fabrication technologies, and functioning issues.
Release date NZ
December 6th, 2010
Audience
  • Professional & Vocational
Contributor
  • Edited by Nava Setter
Edition
Softcover reprint of hardcover 1st ed. 2005
Illustrations
XII, 414 p.
Pages
414
Dimensions
156x234x22
ISBN-13
9781441936042
Product ID
8939170

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